☰ Duy Duc NGUYEN

Simulations

2017-2019 Scanning Electron Microscope

Keywords: Semiconductor device simulation, vacuum device simulation, electron beam, SEM image, charging effect, secondary electron emission, FEM, Fenics
Summary: Electron beam scans the specimen from the left to the right, from the top to the bottom. Secondary electrons emission are collected and used to generate SEM image. The image is affected by negative or positive charges. For more detail, please read my publications in 2018 [PDF] and 2019 [PDF].
2D simulations:
2D Si Scan

Electron beam scans Si sample

2D SiO2 Scan

Electron beam scans SiO2 sample

2D E Si Scan

Electrical field during the scanning. Secondary electrons drift toward the electrical field

Secondary Electron Emission signal
2D Si SEE 2D SiO2 SEE

SEE signals from scanning Si and SiO2 samples

2D SEM images
2D Si SEM images 2D SiO2 SEM images

SEM images generated SEE signals

3D simulations:
3D Si Scan

Electron beam scans Si sample

3D SiO2 Scan

Electron beam scans SiO2 sample

Mesh participations:
distributed mesh p1 distributed mesh p1 distributed mesh p1 distributed mesh p2 distributed mesh p3

Geometry of a specimen with a pattern in total and in partition for parallel computing

SEM images:
3D Si SEM images 3D SiO2 SEM images

SEM images generated SEE signals